JPH0437259U - - Google Patents
Info
- Publication number
- JPH0437259U JPH0437259U JP8046790U JP8046790U JPH0437259U JP H0437259 U JPH0437259 U JP H0437259U JP 8046790 U JP8046790 U JP 8046790U JP 8046790 U JP8046790 U JP 8046790U JP H0437259 U JPH0437259 U JP H0437259U
- Authority
- JP
- Japan
- Prior art keywords
- target material
- sputtering
- cleaning
- block diagram
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000013077 target material Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8046790U JPH0437259U (en]) | 1990-07-26 | 1990-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8046790U JPH0437259U (en]) | 1990-07-26 | 1990-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0437259U true JPH0437259U (en]) | 1992-03-30 |
Family
ID=31625556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8046790U Pending JPH0437259U (en]) | 1990-07-26 | 1990-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437259U (en]) |
-
1990
- 1990-07-26 JP JP8046790U patent/JPH0437259U/ja active Pending
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